Micromachines | Free Full-Text | Investigation on Design Theory and Performance Analysis of Vacuum Capacitive Micromachined Ultrasonic Transducer
Evaluation of capacitance changes of capacitive micromachined ultrasonic transducers for ultrasonic diagnoses by charge‐injection - Aono - 2018 - Electronics and Communications in Japan - Wiley Online Library
Micromachines | Free Full-Text | A Study on Capacitive Micromachined Ultrasonic Transducer Periodic Sparse Array
Micromachines | Free Full-Text | A Study on Capacitive Micromachined Ultrasonic Transducer Periodic Sparse Array
Capacitive micromachined ultrasonic transducers: Transmission evaluation with different membrane materials and dimensions
Sensors | Free Full-Text | Encapsulation of Capacitive Micromachined Ultrasonic Transducers (CMUTs) for the Acoustic Communication between Medical Implants
a) Structure of a sacrificial release CMUT with vias for backside... | Download Scientific Diagram
Process flow of fabrication of the CMUT devices. (a) realization of... | Download Scientific Diagram